A coating machine is a device used to apply a thin film on the surface of materials, which can provide protection, decoration, enhanced performance, or special functions. Coating technology is widely used in various industries, such as manufacturing, electronics, automotive, construction, and decoration.
A typical coating machine usually includes the following core parts:
1. Vacuum system: Provide and maintain a high vacuum environment required for coating, including vacuum chambers, mechanical pumps, molecular pumps (or diffusion pumps), etc.
2. Coating source: Depending on the technology type, it can be an evaporation source (such as a resistance heating boat, electron gun), sputtering target, CVD gas introduction system, etc.
3. Substrate support and motion mechanism: used to place substrates and can achieve rotation, heating, bias voltage, etc. to ensure the uniformity and performance of the film layer.
4. Thin film monitoring system: precise control of thin film thickness, such as quartz crystal film thickness gauge, optical monitoring instrument, etc.
5. Process control system: controls the parameters of the entire coating process, such as vacuum degree, temperature, air pressure, power supply, gas flow rate, etc.
The key parameters include: vacuum degree, deposition rate, film uniformity, film adhesion, film purity, equipment stability and repeatability, etc.
As the core equipment for manufacturing precision thin films, coating machines are an important support for modern technological progress. It uses vacuum as a stage and physical or chemical processes as means to create thin film materials with various excellent properties at the microscopic scale, profoundly affecting our technological life.